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800型光學(xué)正面和背面光刻機(jī)系統(tǒng)

OAI模型800光刻機(jī)是半自動(dòng)，four-camera、光學(xué)正面和背面光刻機(jī)。它提供極其精確的(1碌m - 2 m碌)對準(zhǔn)精度，旨在大大超過任何紅外背后對準(zhǔn)器性能的一個(gè)非常有競爭力的價(jià)格。通用模型800光刻機(jī)是理想的用于低產(chǎn)量、研發(fā)實(shí)驗(yàn)室和大學(xué)。

模型800光刻機(jī)配置了各種各樣的的OAI紫外線光源，在權(quán)力范圍2千瓦。光刻機(jī)工具可以容納基質(zhì)8英寸廣場，以及晶片卡盤定位允許方便裝卸。這個(gè)劃算的光刻機(jī)還包括機(jī)動(dòng)背后焦點(diǎn)，電動(dòng)汽車水準(zhǔn)和汽車差距設(shè)置。

建立在隔振平臺(tái)，固定器總成擔(dān)保的固定不變的面具對準(zhǔn)精度和可重復(fù)性。使用易讀的操作簡化，PLC觸摸屏。培訓(xùn)時(shí)間短，操作員可以有效地學(xué)習(xí)使用光刻機(jī)在不到一個(gè)小時(shí)。

Model 800 Optical Front and Backside Mask Aligner System

The OAI Model 800 Mask Aligner is a semi-automated， four-camera， optical front and backside mask Aligner. It delivers ultra-precise (1碌m-2碌m) alignment accuracy and is designed to greatly surpass the performance of any IR backside Aligner at an extremely competitive price. The versatile Model 800 mask Aligner is ideal for use in low volume production， R&D labs， and universities.

The Model 800 Mask Aligner is configured with a wide variety of OAI UV light sources that range in power up to 2KW. The mask Aligner tooling can accommodate substrates up to 8-inch square， and the wafer chuck is positioned to allow for easy loading and unloading. This cost-effective mask Aligner also features motorized backside focus， motorized auto leveling and auto gap setting.

Built on a vibration isolation platform， the fixed mask holder assembly guarantees alignment accuracy and repeatability. Operation is simplified using the easy-to-read， PLC touch-screen. Training time is short; an operator can learn to use the mask Aligner effectively in less than one hour.